Variable resistance memory device

ABSTRACT

A variable resistance memory device includes a plurality of column selection switches, a plurality of variable resistance memory cells configured to be stacked and selected by the plurality of column selection switches, and a bit line connected to the plurality of variable resistance memory cells. Each of the plurality of variable resistance memory cells includes an ovonic threshold switch (OTS) element selectively driven by a plurality of word lines arranged to be stacked and a variable resistor connected in parallel to the OTS element.

CROSS-REFERENCES TO RELATED APPLICATION

This application claims priority under 35 U.S.C, 119(a) to Koreanapplication number 10-2012-0121125, filed on Oct. 30. 2012, in theKorean Patent Office, which is incorporated by reference in itsentirety.

BACKGROUND

1. Technical Field

The inventive concept relates to a variable resistance memory device,and, more particularly, to a 3-dimensional (3D) stack type variableresistance memory device,

2. Related Art

With the rapid development of mobile and digital informationcommunication and consumer-electronic industry, studies on existingelectronic charge controlled devices are expected to encounter alimitation. Thus, new functional memory devices of the new concept otherthan the existing electronic charge devices need to be developed. Inparticular, next-generation memory devices with large capacity,ultra-high speed, and ultra-low power need to be developed.

Currently, resistive memory devices using a resistance element as amemory medium have been suggested as the next-generation memory devices.Typical resistive memory devices include phase-change random accessmemories (PCRAMs), resistance RAMs (ReRAMs), and magentoresistive RAMs(MRAMs),

The resistive memory devices may be basically configured of a switchingelement and a resistance element. Also, the resistive memory devices maystore data “0” or “1” according to a state of the resistance element.

Even in the resistive memory devices, the first priority is to improvean integration density and to integrate as many memory cells in a narrowarea as possible. Further, in the resistive memory devices, when theplurality of memory cells is integrated in a limited area, switchingperformance has to be ensured.

SUMMARY

According to one aspect of an exemplary embodiment of the presentinvention, there is provided a variable resistance memory device. Thevariable resistance memory device may include a semiconductor substrate,a column selection switch formed on the semiconductor substrate, astacked gate formed on the column selection switch, wherein the stackedgate includes a plurality of conductive layers that is stacked to beinsulated from one another, an ovonic threshold switch (OTS) materiallayer formed on the stacked gate and connected to the column selectionswitch, and a variable resistance material layer formed on a surface ofthe OTS material layer.

According to another aspect of an exemplary embodiment of the presentinvention, there is provided a variable resistance memory device. Thevariable resistance memory device may include a semiconductor substrate,and a plurality of memory cells stacked on the semiconductor substrateand connected to one another in series, Each of the plurality of thememory cells includes an ovonic threshold switch (OTS) and a variableresistance layer,

According to still another aspect of an exemplary embodiment of thepresent invention, there is provided a variable resistance memorydevice. The variable resistance memory device may include a plurality ofcolumn selection switches, a plurality of variable resistance memorycells configured to be stacked, and to be selected by the plurality ofcolumn selection switches, and a bit line connected to the plurality ofvariable resistance memory cells. Each of the plurality of variableresistance memory cells includes an ovonic threshold switch (OTS)element selectively driven by a plurality of word lines that is stackedand a variable resistor connected in parallel to the OTS element.

These and other features, aspects, and embodiments are described belowin the section entitled “DETAILED DESCRIPTION.”

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects, features and advantages of the subjectmatter of the present disclosure will be more clearly understood fromthe following detailed description taken in conjunction with theaccompanying drawings in which:

FIG. 1 is a circuit diagram illustrating a variable resistance memorydevice according to an exemplary embodiment of the inventive concept;

FIG. 2 is a graph illustrating current-voltage characteristic of anovonic threshold switch (OTS) applied to an exemplary embodiment of theinventive concept;

FIGS. 3 and 4 are views illustrating an operation of a variableresistance memory device according to an exemplary embodiment of theinventive concept; and

FIGS. 5 to 9 are cross-sectional views illustrating a method formanufacturing a variable resistance memory device according to anexemplary embodiment of the inventive concept.

DETAILED DESCRIPTION

Hereinafter, exemplary embodiments will be described in greater detailwith reference to the accompanying drawings.

Exemplary embodiments are described herein with reference tocross-sectional illustrations that are schematic illustrations ofexemplary embodiments (and intermediate structures). As a result,variations of the shapes of the illustrations, such as the manufacturingtechniques and/or tolerances, are to be expected. Thus, exemplaryembodiments should not be construed as limited to the particular shapesof regions illustrated herein but should be understood to includedeviations in shapes that result from manufacturing. Thus, in thedrawings, lengths and sizes of layers and regions may be exaggerated forclarity. Throughout the disclosure, reference numerals corresponddirectly to the like numbered parts in the various figures andembodiments of the present invention. It should be readily understoodthat the meaning of “on” and “over” in the present disclosure should beinterpreted in the broadest manner such that “on” means not only“directly on” but also “on” something with an intermediate feature(s) ora layer(s) therebetween, and that “over” means not only directly on topbut also on top of something with an intermediate feature(s) or alayer(s) therebetween.

Referring to FIG. 1, a variable resistance memory device 10 includes aplurality of memory cells mc1, mc2, mc3, and mc4 connected in series.

The plurality of memory cell's mc1 to mc4 may be connected in seriesbetween a bit line BL and a common source line CS. In other words, theplurality of memory cells mc1 to mc4 connected in series may besequentially stacked on a semiconductor substrate (not shown). In theexemplary embodiment, the plurality of memory cells mc1 to mc4, whichare stacked to be connected in series, is referred to and will bedescribed as column strings SS1 and SS2.

Each of memory cells mc1 to mc4 may include each of switching elementsOTS1 to OTS 4 and each of variable resistors R1 to R4. The switchingelement and the variable resistor constituting each memory cell may beconnected parallel to each other. In the exemplary embodiment, an ovonicthreshold switch (OTS) element may be used as the switching elementsOTS1 to OTS 4. The OTS element for the switching elements OTS1 to OTS 4is an element of which a threshold voltage varies based on current orvoltage. This OTS element is disclosed in U.S. Pat. No. 5,694,146 indetail.

A channel layer (hereinafter, referred to as an OTS material layer)applied to the exemplary embodiment may include a chalcogenide materialcontaining at least one selected from the group that includes tellurium(Te), selenium (Se), silicon (Si), arsenic (As), titanium (Ti) sulfur(S), and antimony (Sb). The chalcogenide material used for the OTSmaterial layer may have superior conductivity and current mobility to avariable resistance material used for the variable resistors R1 to R4.

As shown in FIG. 2, the OTS element has the characteristic that acurrent I is not generated in a period (a) when a gate voltage of theOTS element is not supplied, and the current I is increased in a period(b) when a constant gate voltage is supplied. Therefore, in theexemplary embodiment, the read/write from/in the variable resistor maybe performed using the current generated by the gate voltage of the OTSelement.

Switches SW1 and SW2 are column selection switches configured to selectthe column strings SS1 and SS2, respectively. Thus, the switches SW1 andSW2 are also referred to as, for example, column selection transistorsSW1 and SW2.

Hereinafter, an operation of a variable resistance memory deviceaccording to an exemplary embodiment will be described.

In the exemplary embodiment, an example of data reading/writing from/inthe second memory cell mc2 of the first column string SS1 of FIG. 1 willbe described.

Referring to FIG. 3, a high voltage, as a gate voltage VC1 is suppliedto the first column selection transistor SW1 that is configured toselect the first column string SS1.

Subsequently, the OTS elements OTS1, OTS3, and OTS4 of the first, third,and fourth memory cells mc1, mc3, and mc4, other than the second memorycell mc2 from which data is to be read, are enabled. In other words,high voltages, as first, third, and fourth gate voltages VG1, VG3, andVG4, are supplied to enable the first, third, and fourth OTS elementsOTS1, OTS3, and OTS4, and a low voltage, as a second gate voltage VG2,is supplied to disable the second OTS element OTS2. The high voltage maycorrespond to a voltage in a range in which a current may be generatedin the OTS element, and the low voltage may mean a state in which avoltage is not supplied.

As a result, the fourth, third, and first OTS elements OTS4, OTS3, andOTS1 of the fourth, third, and first memory cells mc4, mc3, and mc1 areturned on to form current paths. The second OTS element OTS2 of thesecond memory cell mc2 is disabled, so a current path is formed throughthe second variable resistor R2.

Therefore, a write current Iwrite provided from the bit line BL flows tothe common source line CS through the fourth and third OTS elements OTS4and OTS3, the second variable resistor R2, and the first OTS elementOTS1, and thus the data is written in the second variable resistor R2.

Referring FIG. 4, in the same switching on/off state as in the writeoperation described above, a read current Iread is provided from the bitline BL to the selected column string SS1. The read current Treadreaches the common source line CS connected to a ground terminal throughthe corresponding current path. The data that is written in the secondvariable resistor R2 may be varied based on measurement of the value ofthe current reaching the common source line CS. The read current Treadmay have a level that may not affect a crystalline state of a variableresistor R2. In other words, the read current Iread may have a lowervalue than that of a write current Iwrite.

FIGS. 5 to 9 are cross-sectional views illustrating a method formanufacturing a variable resistance memory device according to anexemplary embodiment of the inventive concept.

Referring to FIG. 5, a common source region 105 is formed on asemiconductor substrate 100. The common source region 105 may include,for example, an impurity region or a conductive layer.

A conductive layer having a constant thickness is formed on the commonsource region 105 and then patterned to form a channel pillar 110. Animpurity is implanted into an upper portion of the channel pillar 110 toform a drain region 115. Thus, a channel formation region is defined inthe channel pillar 110.

The channel pillar 110 may be formedn each of regions defined as thecolumn strings 551 and SS2. A gate insulating layer 120 is deposited onthe semiconductor substrate 100 on which the channel pillar 110 isformed. A gate 125 is formed to surround the channel pillar 110. Thegate 125 may be formed to have a height for a thickness) correspondingto the channel formation region. Therefore, each of the vertical columnselection transistors SW1 and SW2 is formed.

An interlayer insulating layer 130 is formed on the semiconductorsubstrate 100 in which the column selection transistors SW1 and SW2 areformed. The interlayer insulating layer 130 may be formed to have athickness so that the column selection transistors SW1 and SW2 areburied therein. Then, the interlayer insulating layer 130 is planarizedto expose the drain region 115. Subsequently, an ohmic layer 135 may beformed in the exposed drain region 115 through a conventional method. Inthe exemplary embodiment, for example, a silicide layer may be used asthe ohmic layer 135.

Referring to FIG. 6, a stacked gate pattern is formed by alternatelydepositing an insulating layer 140 a, 140 b, 140 c, and 140 d and aconductive layer 145 a, 145 b 145 c, and 145 d at least one or moretimes on the interlayer insulating layer 130. In the exemplaryembodiment, the stacked gate pattern may be formed so that an insulatinglayer 140 e is disposed as the uppermost layer and the insulating layer140 a, 140 b, 140 c, 140 d, and 140 e and the conductive layer 145 a 145b, 145 c, and 145 d are alternately stacked four times in respectiveorder.

The conductive layers 145 a, 145 b, 145 c, and 145 d may be a gatematerial of an OTS transistor and may include, for example, one or morematerials selected from the group that includes doped polysilicon,tungsten (W), copper (Cu), titanium nitride (TiN), tantalum nitride(TaN), tungsten nitride (WN), molybdenum nitride (MoN), niobium nitride(NbN), titanium silicon nitride (TiSiN), titanium aluminum nitride(TiAlN), titanium boron nitride (TiBN), zirconium silicon nitride(ZrSiN), tungsten silicon nitride (WSiN), tungsten boron nitride (WBN),zirconium aluminum nitride (ZrAlN), molybdenum silicon nitride (MoSiN),molybdenum aluminum nitride (WAIN), tantalum silicon nitride (TaSiN),tantalum aluminum nitride (TaAlN), titanium (Ti), tungsten (W),molybdenum (Mo), tantalum (Ta), titanium silicide (TiSi), tantalumsilicide (TaSi), titanium tungsten (TiW), titanium oxynitride (TiON),titanium aluminum oxynitride (TiAlON), tungsten oxynitride (WON), andtantalum oxynitride (TaON).

Referring to FIG. 7, the insulating layers 140 a, 140 b, 140 c, 140 d,and 140 e and the conductive layers 145 a, 145 b, 145 c, and 145 d areetched to form a hole H exposing the ohmic layer 135 on each channelpillar 110. Next, a gate insulating layer 150 is deposited on a surfaceof the semiconductor substrate 100 including the hole H andanisotropically etched so that the gate insulating layer 150 of the OTStransistor is disposed on a sidewall portion of the hole H.

Referring to FIG. 8, an OTS material layer 155 and a variable resistancematerial layer 160 are sequentially deposited on the surface of thesemiconductor substrate 100 including the gate insulating layer 150formed on the sidewall portion of the hole H. The OTS material layer 155may include at least one selected from the group of tellurium (Te),selenium (Se), germanium (Ge), silicon (Si), arsenic (As), titanium(Ti), sulfur (S) and antimony (Sb). Composition of the OTS materiallayer 155 may be controlled so that the OTS material layer 155 has anegative differential resistance (NDR) characteristic. The variableresistance material layer 160 may include one selected from the groupthat includes a PCMO layer that is a material for a ReRAM, achalcogenide layer that is a material for a PCRAM, a magnetic layer thatis a material for a MRAM, a magnetization reversal device layer that isa material for a spin-transfer torque magnetoresistive RAM (STTMRAM),and a polymer layer that is a material for a PoRAM. An adhesionimproving layer (not shown) may be interposed between the OTS materiallayer 155 and the variable resistance material layer 160, Further, theOTS material layer 155 may be formed to be thicker than that of thevariable resistance material layer 160 so that when the OTS transistoris turned on, current flow may be induced toward the OTS transistorrather than the variable resistor. Further, since the write currentIwrite varies based on a deposition thickness of the variable resistancematerial layer 160, low current driving is possible. In the exemplaryembodiment, a resistor generated at an interface between the OTSmaterial layer 155 and the variable resistance material layer 160 mayserve as a heating electrode.

Next, a buried insulating layer 165 is formed on the semiconductorsubstrate 100 including the OTS material layer 155 and the variableresistance material layer 160. The buried insulating layer 165, thevariable resistance material layer 160, and the OTS material layer 155are planarized until the uppermost insulating layer 140 e is exposed,and thus the buried insulating layer 165 is filled within the hole H.

Referring to FIG. 9, a bit line 170 is formed on the resultingstructure, in which the buried insulating layer 165 is buried in thehole H disposed on the semiconductor substrate 100.

According to the exemplary embodiments, cell gates are stacked and aplurality of memory cells is formed to be stacked in a confined space.Therefore, a density of integration may be improved. Further, an OTStransistor almost similar to a behavior of a variable resistance memoryis used as a switching element, and thus switching characteristics maybe further improved.

The inventive concept is not limited to the above-described exemplaryembodiments.

Although the column selection transistor is disposed between the stackedgate and the semiconductor substrate in the exemplary embodiment, thecolumn selection transistor may be disposed between the stacked gate andthe bit line.

The above embodiments of the present invention are illustrative and notlimitative. Various alternatives and equivalents are passible. Theinvention is not limited by the embodiment described herein nor is theinvention limited to any specific type of semiconductor device. Otheradditions, subtractions, or modifications are obvious in view of thepresent disclosure and are intended to fall within the scope of theappended claims.

1. A variable resistance memory device, comprising: a semiconductorsubstrate; a column selection switch formed on the semiconductorsubstrate; stacked gates formed on the column selection switch, whereinthe stacked gates include a plurality of conductive layers that arestacked to be insulated from one another; an ovonic threshold switch(OTS) material layer formed on a sidewall of the stacked gates andconnected to the column selection switch; and a variable resistancematerial layer formed on a surface of the OTS material layer.
 2. Thevariable resistance memory device of claim 1, wherein the columnselection switch includes a vertical channel transistor, wherein thevertical channel transistor includes: a common source region formed onthe semiconductor substrate; a channel pillar formed on the commonsource region; a drain formed in an upper region of the channel pillar;a gate surrounding an outer circumference of the channel pillar; and afirst gate insulating layer interposed between the channel pillar andthe gate.
 3. The variable resistance memory device of claim 2, whereinthe stacked gates are formed to be disposed at either side of the drain.4. The variable resistance memory device of claim 2, wherein the OTSmaterial layer is formed on the drain of the vertical channeltransistor.
 5. The variable resistance memory device of claim 4, whereinthe OTS material layer includes at least one selected from the group oftellurium (Te), selenium (Se), germanium (Ge), silicon (Si), arsenic(As), titanium (Ti), sulfur (S), and antimony (Sb), and wherein the OTSmaterial layer has a negative differential resistance (NDR)characteristic.
 6. The variable resistance memory device of claim 1,wherein the variable resistance material layer includes a PCMO layerthat is a material for a ReRAM, a chalcogenide layer that is a materialfor a PCRAM, a magnetic layer that is a material for a MRAM, amagnetization reversal device layer that is a material for aspin-transfer torque magnetoresistive RAM (STTMRAM), or a polymer layerthat is a material for a PoRAM.
 7. A variable resistance memory device,comprising: a semiconductor substrate; and a plurality of memory cellsstacked on the semiconductor substrate and connected to one another inseries between a bit line and a common source line, wherein each of theplurality of memory cells includes an ovonic threshold switch (OTS) anda variable resistance layer, wherein the OTS includes a plurality ofgates stacked to be insulated from each other and the OTS is configuredto be turned on based on selection of the plurality of gates.
 8. Thevariable resistance memory device of claim 7, wherein the OTS and thevariable resistance layer are connected in parallel to each other. 9.(canceled)
 10. A variable resistance memory device, comprising: aplurality of column selection switches connected to a common sourceline; a plurality of variable resistance memory cells configured to bestacked, and to be selected by the plurality of column selectionswitches; and a bit line connected to the plurality of variableresistance memory cells, wherein each of the plurality of variableresistance memory cells includes an ovonic threshold switch (OTS)element selectively driven by a plurality of word lines that is stackedand a variable resistor connected in parallel to the OTS element.